Comment AG4108 SNF 2006-03-15 22:54:42: System stopped a few times

king at snf.stanford.edu king at snf.stanford.edu
Wed Mar 15 22:54:42 PST 2006


Temp overshoot or just stopping for no apparent reason and leaving the wafer in the chamber.   The software just seemed to have some odd glitches as compared to the 4100.  




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