Comment AG4108 SNF 2006-03-15 22:54:42: System stopped a few times

king at snf.stanford.edu king at snf.stanford.edu
Wed Mar 15 22:54:42 PST 2006

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Temp overshoot or just stopping for no apparent reason and leaving the wafer in the chamber.   The software just seemed to have some odd glitches as compared to the 4100.

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