From nvgirish at snf.stanford.edu  Thu Jul 26 02:16:30 2007
From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu)
Date: Thu, 26 Jul 2007 02:16:30 -0700
Subject: Problem AG4108 SNF 2007-07-26 02:16:28: Temp sensor
Message-ID: <mailman.512.1356280553.3222.ag4108-pcs@snf.stanford.edu>

Gave a "Temp sensor problem or Lamp not on". Could not run process. When tried again, it gave "Temperature out of limit at ramp".



From eenriquez at snf.stanford.edu  Mon Jul 30 14:43:31 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 30 Jul 2007 14:43:31 -0700
Subject: Comment AG4108 SNF 2007-07-30 14:43:27: Update
Message-ID: <mailman.513.1356280553.3222.ag4108-pcs@snf.stanford.edu>

Chamber is coated.  Need to clean chamber.



From eenriquez at snf.stanford.edu  Tue Jul 31 14:32:08 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 31 Jul 2007 14:32:08 -0700
Subject: Comment AG4108 SNF 2007-07-30 14:43:27: Update
Message-ID: <mailman.514.1356280553.3222.ag4108-pcs@snf.stanford.edu>

New update.



From eenriquez at snf.stanford.edu  Tue Jul 31 14:35:26 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 31 Jul 2007 14:35:26 -0700
Subject: Comment AG4108 SNF 2007-07-31 14:35:26: Update
Message-ID: <mailman.515.1356280553.3222.ag4108-pcs@snf.stanford.edu>

Cleaned the chamber in HF/nitric.  Now needs a temperature cal.