Shutdown AG4108 SNF 2007-09-25 21:36:47: wafer broke in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 3 15:48:44 PDT 2007

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Completed pyrometer calibration.  Need to run a process qualification.

Next message: Comment AG4108 SNF 2007-09-28 08:26:34: Update broken wafer
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