From slcheng at snf.stanford.edu Mon Sep 10 12:52:00 2007 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Mon, 10 Sep 2007 12:52:00 -0700 Subject: Shutdown AG4108 SNF 2007-09-10 12:51:58: Water Leak Message-ID: From eenriquez at snf.stanford.edu Mon Sep 10 13:55:20 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Sep 2007 13:55:20 -0700 Subject: Comment AG4108 SNF 2007-09-10 13:55:20: Update water leak Message-ID: Cleaned up water leak. Will let system dry out over night before troubleshooting From cbaxter at snf.stanford.edu Tue Sep 11 12:49:24 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 11 Sep 2007 12:49:24 -0700 Subject: Shutdown AG4108 SNF 2007-09-10 12:51:58: Water Leak Message-ID: Changed two bad 1/4 elbow fitting andf also, installed two new shutoff valve on process cooling lines. From slcheng at snf.stanford.edu Wed Sep 12 11:24:28 2007 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 12 Sep 2007 11:24:28 -0700 Subject: Shutdown AG4108 SNF 2007-09-12 11:24:28: water leak Message-ID: From maurice at snf.stanford.edu Wed Sep 12 11:51:08 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 12 Sep 2007 11:51:08 -0700 Subject: Shutdown AG4108 SNF 2007-09-12 11:51:07: wall breaker off Message-ID: epo hit wall breaker powered off (manually) From eenriquez at snf.stanford.edu Thu Sep 13 09:01:08 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Sep 2007 09:01:08 -0700 Subject: Comment AG4108 SNF 2007-09-13 09:01:07: Update water leak Message-ID: Water leak is caused by the user's recipe. We are trying to find a way to make the cooling water line connection more heat resistant. From cbaxter at snf.stanford.edu Thu Sep 13 11:04:13 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Sep 2007 11:04:13 -0700 Subject: Shutdown AG4108 SNF 2007-09-12 11:51:07: wall breaker off Message-ID: repaired water leak and power up the tool. we installed a 6" copper tubing on the supply and return line so that 1/4 poly tubing is not pulling on the water line. From cbaxter at snf.stanford.edu Thu Sep 13 11:04:18 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Sep 2007 11:04:18 -0700 Subject: Shutdown AG4108 SNF 2007-09-12 11:24:28: water leak Message-ID: From mislam at snf.stanford.edu Tue Sep 25 21:36:47 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 25 Sep 2007 21:36:47 -0700 Subject: Shutdown AG4108 SNF 2007-09-25 21:36:47: wafer broke in chamber Message-ID: From eenriquez at snf.stanford.edu Wed Sep 26 19:07:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Sep 2007 19:07:50 -0700 Subject: Comment AG4108 SNF 2007-09-26 19:07:49: Update broke wafer Message-ID: Chamber is heavily coated. Need to pull chamber out and cleaned. From eenriquez at snf.stanford.edu Fri Sep 28 08:25:06 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Sep 2007 08:25:06 -0700 Subject: Comment AG4108 SNF 2007-09-26 19:07:49: Update broke wafer Message-ID: Quartz chamber has been cleaned and reassembled. Need to perform pyrometer calibration. From eenriquez at snf.stanford.edu Fri Sep 28 08:26:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Sep 2007 08:26:35 -0700 Subject: Comment AG4108 SNF 2007-09-28 08:26:34: Update broken wafer Message-ID: Quartz chamber has been cleaned and reassembled. Need to perform pyrometer calibration.