Shutdown AG4108 SNF 2008-08-26 19:52:45: pate overtemp after every wfr

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri Aug 29 13:56:28 PDT 2008


An adjustment was made to the oven air cooling.  This may or may not have solved the over temperature problem.  I am changing the system to a yellow light for the long weekend, but please be careful with your wafers.




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