From eenriquez at snf.stanford.edu Wed Dec 3 16:57:28 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Dec 2008 16:57:28 -0800 Subject: Comment AG4108 SNF 2008-12-03 16:57:27: Update Message-ID: According to field service, the chamber cooling channels were all very restricted. They will finish rebuilding it this week and will install it by next Wed. From eenriquez at snf.stanford.edu Wed Dec 3 18:40:22 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Dec 2008 18:40:22 -0800 Subject: Comment AG4108 SNF 2008-11-12 16:50:44: Update over temp Message-ID: Archive From eenriquez at snf.stanford.edu Tue Dec 16 10:50:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Dec 2008 10:50:41 -0800 Subject: Shutdown AG4108 SNF 2008-11-03 17:54:57: Qual Failed: Top Plate Overtemp Message-ID: Field service cleaned chamber cooling channels. Performed pyrometer calibration. Found the bottom over temperature switch had been tripped (before the cooling line clean). Ran the RTA 850 recipe with no problem. Needs a process qual before running actual devices. From eenriquez at snf.stanford.edu Tue Dec 16 10:50:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Dec 2008 10:50:49 -0800 Subject: Problem AG4108 SNF 2008-11-03 09:34:13: Temperature Faults Message-ID: Field service cleaned chamber cooling channels. Performed pyrometer calibration. Found the bottom over temperature switch had been tripped (before the cooling line clean). Ran the RTA 850 recipe with no problem. Needs a process qual before running actual devices. From eenriquez at snf.stanford.edu Tue Dec 16 10:50:58 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Dec 2008 10:50:58 -0800 Subject: Comment AG4108 SNF 2008-12-03 16:57:27: Update Message-ID: Archive From eenriquez at snf.stanford.edu Tue Dec 16 10:51:16 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Dec 2008 10:51:16 -0800 Subject: Problem AG4108 SNF 2008-12-16 10:51:16: Needs a process qualification Message-ID: