Shutdown AG4108 SNF 2008-11-03 17:54:57: Qual Failed: Top Plate Overtemp

eenriquez at eenriquez at
Tue Dec 16 10:50:41 PST 2008

Field service cleaned chamber cooling channels.  Performed  pyrometer calibration.  Found the bottom over temperature switch had been tripped (before the cooling line clean).  Ran the RTA 850 recipe with no problem.
Needs a process qual before running actual devices.

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