Problem AG4108 SNF 2008-11-03 09:34:13: Temperature Faults

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Dec 16 10:50:49 PST 2008


Field service cleaned chamber cooling channels.  Performed  pyrometer calibration.  Found the bottom over temperature switch had been tripped (before the cooling line clean).  Ran the RTA 850 recipe with no problem.
Needs a process qual before running actual devices.




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