Problem AG4108 SNF 2008-02-06 14:34:43: Wafer tilted in chamber
jrjain at snf.stanford.edu
jrjain at snf.stanford.edu
Wed Feb 6 14:34:44 PST 2008
Noticed that wafers sit tilted/slanted in chamber. Visually obvious
More information about the AG4108-pcs
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