From emyers at snf.stanford.edu Tue Jul 1 08:50:12 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 1 Jul 2008 08:50:12 -0700 Subject: Shutdown AG4108 SNF 2008-06-19 22:23:35: no lamps Message-ID: Elmer spent a lot of time troubleshooting. Problem seemed to be isolated to one recipe. Recipe was calling out a TC wafer for temperature control. None in the system, so the recipe failed. From emyers at snf.stanford.edu Tue Jul 1 08:50:36 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 1 Jul 2008 08:50:36 -0700 Subject: Comment AG4108 SNF 2008-06-24 15:20:56: Update Message-ID: Seemed to be a recipe problem From emyers at snf.stanford.edu Tue Jul 1 08:51:32 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 1 Jul 2008 08:51:32 -0700 Subject: Comment AG4108 SNF 2008-06-20 10:10:52: Error Statements Message-ID: User was running multiple recipes in sequence in manual. 3rd recipe appeared to fail. The recipe was calling for a TC control, which we don't have. From jackson at snf.stanford.edu Wed Jul 9 21:26:49 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Wed, 9 Jul 2008 21:26:49 -0700 Subject: Problem AG4108 SNF 2008-07-09 21:26:49: alarm "plate over temp" Message-ID: ran 4 wfrs then stopped, alarms before wafer is loaded From jackson at snf.stanford.edu Thu Jul 10 21:02:18 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Thu, 10 Jul 2008 21:02:18 -0700 Subject: Shutdown AG4108 SNF 2008-07-10 21:02:18: plate over temp alarms before running wfrs Message-ID: From shott at snf.stanford.edu Thu Jul 10 21:51:43 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 10 Jul 2008 21:51:43 -0700 Subject: Problem AG4108 SNF 2008-07-09 21:26:49: alarm "plate over temp" Message-ID: Reset 2 of the 3 "top plate" overtemp sensors. System should heat now. From shott at snf.stanford.edu Thu Jul 10 21:52:53 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Thu, 10 Jul 2008 21:52:53 -0700 Subject: Shutdown AG4108 SNF 2008-07-10 21:02:18: plate over temp alarms before running wfrs Message-ID: Ocver temp switches had not been reset following last evening's overtemp condtion. I reset them (2 had tripped) and things should be OK to run. John From jackson at snf.stanford.edu Thu Jul 10 22:37:02 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Thu, 10 Jul 2008 22:37:02 -0700 Subject: Shutdown AG4108 SNF 2008-07-10 22:37:01: plate overtemp after 3 wafers Message-ID: From shott at snf.stanford.edu Fri Jul 11 06:08:52 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Jul 2008 06:08:52 -0700 Subject: Shutdown AG4108 SNF 2008-07-10 22:37:01: plate overtemp after 3 wafers Message-ID: I've reset 2 of the 3 temperature snap switches ... the top plate and the bottom plate but I didn't have to do the one under the plastic cover. Elmer, it would be good to pull each of those switches and find a digital hotplate that we could use to test them to make sure that they are not tripping prematurely. If I am not mistaken, they should be tripping at 95 deg C. If we don't have a switch problem, we may have some sort of blockage in one or more of the cooling lines. Thanks, John From jackson at snf.stanford.edu Fri Jul 11 18:34:32 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Fri, 11 Jul 2008 18:34:32 -0700 Subject: Shutdown AG4108 SNF 2008-07-11 18:34:31: "plate overtemp" alarm on 4th wfr Message-ID: From shott at snf.stanford.edu Fri Jul 11 19:05:45 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 11 Jul 2008 19:05:45 -0700 Subject: Shutdown AG4108 SNF 2008-07-11 18:34:31: "plate overtemp" alarm on 4th wfr Message-ID: I've cleared this once again. It was once again the top and the bottom sensors. I don't know whether one of the temp sensors is flaky or whether the tube is getting dirty enough that it should be cleaned. John From jackson at snf.stanford.edu Fri Jul 11 20:08:47 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Fri, 11 Jul 2008 20:08:47 -0700 Subject: Problem AG4108 SNF 2008-07-11 20:08:45: still has problem with "plate overtemp" alarm Message-ID: about every 3 wfrs ..trips alarm, then needs reset From jackson at snf.stanford.edu Wed Jul 30 22:42:58 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Wed, 30 Jul 2008 22:42:58 -0700 Subject: Shutdown AG4108 SNF 2008-07-30 22:42:57: plate overtemp... Message-ID: Even with having a five minute delay between wafers will not anneal two wafers in sequence