Shutdown AG4108 SNF 2008-07-10 22:37:01: plate overtemp after 3 wafers
jackson at snf.stanford.edu
jackson at snf.stanford.edu
Thu Jul 10 22:37:02 PDT 2008
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Shutdown AG4108 SNF 2008-07-10 21:02:18: plate over temp alarms before running wfrs
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Shutdown AG4108 SNF 2008-07-10 22:37:01: plate overtemp after 3 wafers
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