Shutdown AG4108 SNF 2008-07-30 22:42:57: plate overtemp...

jackson at snf.stanford.edu jackson at snf.stanford.edu
Wed Jul 30 22:42:58 PDT 2008

Previous message: Problem AG4108 SNF 2008-07-11 20:08:45: still has problem with "plate overtemp" alarm
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Even with having a five minute delay between wafers will not 
anneal two wafers in sequence

Previous message: Problem AG4108 SNF 2008-07-11 20:08:45: still has problem with "plate overtemp" alarm
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