From eenriquez at snf.stanford.edu Mon Jun 2 14:31:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Jun 2008 14:31:27 -0700 Subject: Shutdown AG4108 SNF 2008-05-30 14:59:33: FAILED PROCESS QUAL Message-ID: Performed pyrometer calibration with the system wafer emissivity set at 73. Need to run a process qual From jrjain at snf.stanford.edu Mon Jun 2 20:13:07 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Mon, 2 Jun 2008 20:13:07 -0700 Subject: Comment AG4108 SNF 2008-06-02 20:13:06: Process Qual Data 06/02/2008 Message-ID: with Serene and John W1: Avg. - 104.93, MSE - 2.80 W2: Avg - 110, MSE - 2.68 W3: Avg - 117.91, MSE - 2.59 W4: Avg - 113.73, MSE - 2.67 W5: Avg - 117.5, MSE - 2.55 From masaharu at snf.stanford.edu Wed Jun 11 19:27:56 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 11 Jun 2008 19:27:56 -0700 Subject: Problem AG4108 SNF 2008-06-11 19:27:55: over temperature error Message-ID: From shott at snf.stanford.edu Wed Jun 11 20:44:36 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 11 Jun 2008 20:44:36 -0700 Subject: Problem AG4108 SNF 2008-06-11 19:27:55: over temperature error Message-ID: One of the top plate snap switches tripped again. Even thought his was a fairly low process (600 deg C, I think) it was wafer 23 of a full cassette. At some point, I'd like to run a full cassette so that I can watch the coolant temperature in the loop to see how hot the water temperature gets under these conditions. At this point, however, the system has been reset and restarted.OK to use. John From masaharu at snf.stanford.edu Wed Jun 11 21:35:11 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 11 Jun 2008 21:35:11 -0700 Subject: Problem AG4108 SNF 2008-06-11 21:35:10: over temperature again Message-ID: only after 5 runs From emyers at snf.stanford.edu Fri Jun 13 16:27:52 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 13 Jun 2008 16:27:52 -0700 Subject: Shutdown AG4108 SNF 2008-06-13 16:27:52: Temp Switches Message-ID: Need to reset temperature switches. System should have gone to shutdown and not problem. From emyers at snf.stanford.edu Fri Jun 13 18:53:04 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 13 Jun 2008 18:53:04 -0700 Subject: Problem AG4108 SNF 2008-06-13 18:53:01: Water Leak Message-ID: There is a water leak in the tygon (green) tube on the upper right side and the copper fitting. A slight wiggle and it leaks. I also notice a puddle after processing wafers, so maybe heat adds to the leak. From emyers at snf.stanford.edu Fri Jun 13 21:11:14 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 13 Jun 2008 21:11:14 -0700 Subject: Problem AG4108 SNF 2008-06-11 21:35:10: over temperature again Message-ID: Reset two thermal switches and ran many 4 wafer lots at 600C without a problem. From emyers at snf.stanford.edu Fri Jun 13 21:11:27 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 13 Jun 2008 21:11:27 -0700 Subject: Shutdown AG4108 SNF 2008-06-13 16:27:52: Temp Switches Message-ID: Reset two thermal switches and ran many 4 wafer lots at 600C without a problem. From emyers at snf.stanford.edu Fri Jun 13 21:14:53 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 13 Jun 2008 21:14:53 -0700 Subject: Problem AG4108 SNF 2008-06-13 21:14:48: Temperature Faults Message-ID: We have had a number of reports of the temperature related faults. These have been at temps as low as 600 and as high as 1050. Seems to occur more often when running full cassettes. When this fault occurs you need to shut the system down, since it can not run without a repair. From mdickey at snf.stanford.edu Mon Jun 16 08:41:09 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 16 Jun 2008 08:41:09 -0700 Subject: Problem AG4108 SNF 2008-06-13 18:53:01: Water Leak Message-ID: Leak fixed From ericp at snf.stanford.edu Thu Jun 19 22:23:36 2008 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 19 Jun 2008 22:23:36 -0700 Subject: Shutdown AG4108 SNF 2008-06-19 22:23:35: no lamps Message-ID: Lamps never came on. Failed on very first test wafer. From emyers at snf.stanford.edu Fri Jun 20 10:10:53 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 20 Jun 2008 10:10:53 -0700 Subject: Comment AG4108 SNF 2008-06-20 10:10:52: Error Statements Message-ID: First Error: No AW4100 Card or Card Conn. 2nd Error: Temp sensor problem or lam not.. I reboot the computer, but it did not help. Tried to turn on the lamps in manual, they would not come on. From emyers at snf.stanford.edu Mon Jun 23 08:15:39 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 Jun 2008 08:15:39 -0700 Subject: Comment AG4108 SNF 2008-05-30 14:56:09: Process Qual Data 5/30/08 Message-ID: System was qual'd on 6/2/08 by jrjain. From eenriquez at snf.stanford.edu Tue Jun 24 15:20:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Jun 2008 15:20:56 -0700 Subject: Comment AG4108 SNF 2008-06-24 15:20:56: Update Message-ID: Still troubleshooting the lamp problem. Lamp not turning on seems to be an intermittent problem.