Shutdown AG4108 SNF 2008-05-30 14:59:33: FAILED PROCESS QUAL

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 2 14:31:27 PDT 2008

Next message: Comment AG4108 SNF 2008-06-02 20:13:06: Process Qual Data 06/02/2008
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Performed pyrometer calibration with the system wafer emissivity set at 73.  Need to run a process qual

Next message: Comment AG4108 SNF 2008-06-02 20:13:06: Process Qual Data 06/02/2008
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