Shutdown AG4108 SNF 2008-06-13 16:27:52: Temp Switches
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Fri Jun 13 21:11:27 PDT 2008
Reset two thermal switches and ran many 4 wafer lots at 600C without a problem.
More information about the AG4108-pcs
mailing list