Shutdown AG4108 SNF 2008-06-19 22:23:35: no lamps
ericp at snf.stanford.edu
ericp at snf.stanford.edu
Thu Jun 19 22:23:36 PDT 2008
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Problem AG4108 SNF 2008-06-13 21:14:48: Temperature Faults
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Comment AG4108 SNF 2008-06-20 10:10:52: Error Statements
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Lamps never came on. Failed on very first test wafer.
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Problem AG4108 SNF 2008-06-13 21:14:48: Temperature Faults
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Comment AG4108 SNF 2008-06-20 10:10:52: Error Statements
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