From eenriquez at snf.stanford.edu Thu May 1 07:19:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 May 2008 07:19:35 -0700 Subject: Comment AG4108 SNF 2008-05-01 07:19:35: Update Message-ID: We will be meeting with facilities to see if they could increase the water flow throughout the lab. From news at discount-educational-software.net Mon May 5 17:38:44 2008 From: news at discount-educational-software.net (Educational Software Newsletter) Date: Mon, 5 May 2008 20:38:44 -0400 Subject: Educational Software News - May 2008 Message-ID: <9baee059f207b5ed827cf4b071d700@bmw> Computer Products for Education is pleased to provide Educational Software News to qualified students, faculty, staff, and schools for current news on pricing and availability of Academic Edition Software from Microsoft, Adobe, Corel, Autodesk, Quark, EndNote, FileMaker, and many other major software manufacturers. Windows Vista Service Pack 1 (SP1) has been released and is now included in all Vista versions. Full versions of Windows Vista are now available in 32-bit and 64-bit editions at discounted educational prices. Autodesk recently reorganized their educational software program and discontinued many of their programs at the educational price level. See below for details on currently available AutoCad programs. Please visit our website for more information: http://www.discount-educational-software.net or call 800-679-7007. Educational software is exclusively available to Qualified Students, Faculty, Staff and Schools of K-12 and Higher Education institutions. (see below for details) ------ Education Prices for May 2008 -------- ---------------------- Education Standard You ADOBE Price Retail Save! ---------------------- --------- ------ ----- Acrobat 8.0 Professional $148.95 $500 70% Acrobat 8.0 Standard $96.95 $300 68% After Effects CS3 $348.95 $999 65% CS3 Design Premium (1) $589.95 $1799 67% CS3 Design Standard (2) $389.95 $1199 67% CS3 Master Collection(3) $989.95 $2499 60% CS3 Production Premium (4) $589.95 $1699 65% CS3 Web Premium (5) $489.95 $1599 69% CS3 Web Standard (6) $389.95 $999 61% Dreamweaver CS3 $198.95 $399 50% Flash Professional CS3 $248.95 $699 64% Illustrator CS3 $198.95 $699 72% InDesign CS3 $198.95 $699 72% Photoshop Elements 6.0 $68.95 $150 54% Photoshop Extended CS3 $298.95 $999 70% Premiere Pro CS3 $348.95 $799 56% http://www.discount-educational-software.net/adobe.html (1) CS3 Design Premium includes: InDesign, Photoshop Extended, Illustrator, Flash Pro, Dreamweaver, and Acrobat 8 Pro (2) CS3 Design Standard includes: InDesign, Photoshop, Illustrator, and Acrobat 8 Pro (3) CS3 Master Collection includes: InDesign, Photoshop Extended, Illustrator, Flash Pro, Dreamweaver, Contribute, Fireworks, After Effects Pro, Premiere Pro, Soundbooth, Encore, OnLocation, Ultra, and Acrobat 8 Pro (4) CS3 Production Premium includes: Photoshop Extended, Illustrator, Flash Pro, After Effects Pro, Premiere Pro, Encore, OnLocation, and Ultra (5) CS3 Web Pemium includes: Photoshop Extended, Illustrator, Acrobat 8 Pro, Flash Pro, Dreamweaver, Contribute, and Fireworks (6) CS3 Web Standard includes: Flash Pro, Dreamweaver, Contribute, and Fireworks ---------------------- Education Standard You MICROSOFT Price Retail Save! ---------------------- --------- ------ ----- Expressions Web 1.0 $59.95 $299 80% Office 2007 Professional(2) $189.95 $499 62% Office 2007 Standard(1) $148.95 $399 63% Office 2007 Ultimate(3) $259.95 $679 62% Office 2008 for Macintosh $148.95 $500 70% Office Accounting Pro 2007 $89.95 $229 61% Powerpoint 2007 $118.95 $229 48% Project 2007 Professional $198.95 $999 80% Project 2007 Standard $69.95 $349 80% Visio 2007 Professional $159.95 $559 71% Visio 2007 Standard $84.95 $259 67% Visual Studio 2008 Pro $109.95 $899 88% Windows Vista Business Full SP1 $164.95 $289 43% Windows Vista HomePrem Full SP1 $129.95 $269 52% Windows Vista HomePrem Upg SP1 $74.95 $200 63% Windows Vista Ultimate Full SP1 $219.95 $399 45% Windows XP Pro Upgrade $94.95 $200 53% http://www.discount-educational-software.net/microsoft.html (1)Office 2007 Standard includes: Word, Excel, PowerPoint, Outlook. (2)Office 2007 Professional includes: Word, Excel, PowerPoint, Outlook, Access, Publisher. (3)Office 2007 Ultimate includes: Word, Excel, PowerPoint, Outlook, Access, Publisher, Groove, InfoPath. ---------------------- Education Standard You AUTODESK Price Retail Save! ---------------------- --------- ------ ----- Autocad 2008 1-Year License $158.95 $3750 96% Autocad Architecture 2008 1-Yr $158.95 $4995 97% AutoCAD Revit Arch. 2008 1-Yr $158.95 $4995 97% Inventor Professional 2008 1-Yr $158.95 $4995 97% http://www.discount-educational-software.net/autodesk.html These Autodesk prices are for Students, Faculty, & Staff for personal use - pricing for schools for institutional/class-room lab use is different. Please call 800-679-7007 for more information. ---------------------- Education Standard You QUARK Price Retail Save! ---------------------- --------- ------ ----- Quark QuarkXPress 7.0 $198.95 $945 79% Quark QuarkXPress 7.0 Upgrade $98.95 - - ---------------------- Education Standard You INTUIT Price Retail Save! ---------------------- --------- ------ ----- Quickbooks Pro 2008 $99.95 $199 50% ---------------------- Education Standard You AVID Price Retail Save! ---------------------- --------- ------ ----- Avid Studio Tookit $1294.95 $4999 74% Mojo $994.95 $1695 41% Xpress Pro 5.5 HD $291.95 $1695 83% For more information, visit our website at: http://www.discount-educational-software.net or call 800-679-7007. School purchase orders may be faxed to: 800-679-6996. Educational Software has the exact same features and functionality as Commercial Full-Versions of the software. Visit our website to view thousands of other items and accessories available from CPE at similar discounts. All software products from CPE are authentic original software from the manufacturer. These are not pirated software copies. All software comes in original manufacturer's packaging and contains a valid verifiable license. ------------------------- Volume Licensing: ------------------------- For volume licensing information for schools for quantities of five to ten (5-10) or more units of software, depending on the product(s), please call 800-679-7007 for more information. ---------------------------------------- Qualified Educational Buyers: ---------------------------------------- The following are defined as Qualified Education Buyers. Qualified Educational Buyers must provide the below verification upon making any purchase. 1. Students of Higher Education - All enrolled college, junior college, community college, technical school, vocational school, and university students. 2. K-12 Students - K-12 students are eligible for most, but not all, academic-edition software products. 3. Teachers - All K-12 school and Higher Education institution teachers. 4. K-12 school and Higher Education institution faculty. 5. Staff - All K-12 school and Higher Education institution staff. 6. Schools - All elementary, middle and high schools (K-12 schools); vocational and technical schools; correspondence schools, including Internet correspondence schools, and all colleges, including junior and community colleges, and universities. 7. Home Schools - Home schools are now eligible to purchase most Academic Edition software. Home schools must be approved on a case by case basis. Please call for more details. ------------------------- Verification: ------------------------- Purchasers must provide fax-verification of status as being a current faculty, staff, or student. After placing your order, you simply fax to CPE either: (a) a copy of a current picture School I.D. Card; or, (b) a current paycheck stub with an alternative picture I.D. (drivers license, etc.) Sensitive information may be blacked out; or (c) Schools may purchase by faxing a valid school purchase order. For more details, call us or visit our website. ------------------------- CPE is an Authorized Education Reseller for Microsoft, Adobe, Macromedia, AutoDesk, Corel, Sony, Avid, Pinnacle, Symantec and many other major software manufacturers. CPE is a national software distributor committed to providing the best prices and the best customer service to the Education Community!! Prices generally remain unchanged until the end of the month. However, all prices and availability are subject to change without notice, due to factors outside our control. __________________________ We hope you have found this message valuable. However, if you do not wish to receive any more newsletters from CPE, please use the following link: http://www.discount-educational-software.net/rem.asp?a=remv&e=AG4108-pcs at snf.stanford.edu Or call 800-679-7007 for additional options. __________________________ Sincerely, Computer Products for Education 5325 140th Avenue North Clearwater, Florida 33760 Tel: 800-679-7007 Fax: 800-679-6996 support at discount-educational-software.net ___________________ THANK YOU!!! From eenriquez at snf.stanford.edu Thu May 15 10:39:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 May 2008 10:39:19 -0700 Subject: Shutdown AG4108 SNF 2008-04-28 12:11:56: Low Water Flow Message-ID: Hooked up cooling water line to a recirculator. Flow rate is about 2 gpm. From eenriquez at snf.stanford.edu Thu May 15 10:39:28 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 May 2008 10:39:28 -0700 Subject: Comment AG4108 SNF 2008-05-01 07:19:35: Update Message-ID: Hooked up cooling water line to a recirculator. Flow rate is about 2 gpm. From jackson at snf.stanford.edu Thu May 22 22:40:07 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Thu, 22 May 2008 22:40:07 -0700 Subject: Problem AG4108 SNF 2008-05-22 22:40:06: cooling water problem....RTA stopped Message-ID: Even after facilities reset cooling water ...RTA would not start?? From mdickey at snf.stanford.edu Fri May 23 14:12:24 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 23 May 2008 14:12:24 -0700 Subject: Comment AG4108 SNF 2008-05-23 14:12:23: Chiller Message-ID: Chiller was topped off and back running From shott at snf.stanford.edu Fri May 23 15:55:13 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 23 May 2008 15:55:13 -0700 Subject: Problem AG4108 SNF 2008-05-22 22:40:06: cooling water problem....RTA stopped Message-ID: Mike Dickey added water to the system and restarted the chiller flow. It is now running (as of 4 p.m. Friday, but the pressure looks a little higher than it should. Also, the interlock to the chiller is unplugged which, I think, seems a bit strange. John From jackson at snf.stanford.edu Fri May 23 17:12:08 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Fri, 23 May 2008 17:12:08 -0700 Subject: Problem AG4108 SNF 2008-05-23 17:12:08: overtemp top plate errors / won't run Message-ID: From emyers at snf.stanford.edu Fri May 23 18:18:56 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 23 May 2008 18:18:56 -0700 Subject: Shutdown AG4108 SNF 2008-05-23 18:18:55: Over Temp Switch Message-ID: The chiller is running. There is an Oven Temperature, Top Plate error which I can not clear. It happened last night on the 20th wafer of a 1050C, 30 sec anneal. I restrarted the software 2 times, but the error will not clear. The system was in process last night when it lost the cooling water. Maybe taking out the thermal switch. From shott at snf.stanford.edu Sat May 24 11:22:20 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 24 May 2008 11:22:20 -0700 Subject: Problem AG4108 SNF 2008-05-23 17:12:08: overtemp top plate errors / won't run Message-ID: I think that I have found and reset the top plate overtemp switch. According to the manual, this is set at 90 deg C and once it trips the heaters will be kept off until it is manually reset. I have now reset that (I think) and I have also added cooling capacity so that the temperature of the cooling water (when the tool is not running is about 63 F instead of 83 F. This should improve things when running. Unfortuantely, I'm not qualified to fly this tool (heck, I'm not even allowed to taxi) so I can't test completely if the lamps will come on. If any one who can pilot this tool has the time and the inclination, I'm sure that the rest of the AG community would appreciate it if someone could do a test run to see if the lamps will come back on. Note: because I had the back interlocked doors of the machine open to do this (and I also opened the same doors on the AG4100 for comparison purposes), that may have somehow moved the system into an error condition as well. I also don't know how to reset that, but the doors are now properly closed, so that someone with better piloting skills can probably reset the sytem and software. p.s. I'm about to clear the shutdown related to this same issues. Thanks, John From shott at snf.stanford.edu Sat May 24 11:22:31 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 24 May 2008 11:22:31 -0700 Subject: Shutdown AG4108 SNF 2008-05-23 18:18:55: Over Temp Switch Message-ID: I think that I have found and reset the top plate overtemp switch. According to the manual, this is set at 90 deg C and once it trips the heaters will be kept off until it is manually reset. I have now reset that (I think) and I have also added cooling capacity so that the temperature of the cooling water (when the tool is not running is about 63 F instead of 83 F. This should improve things when running. Unfortuantely, I'm not qualified to fly this tool (heck, I'm not even allowed to taxi) so I can't test completely if the lamps will come on. If any one who can pilot this tool has the time and the inclination, I'm sure that the rest of the AG community would appreciate it if someone could do a test run to see if the lamps will come back on. Note: because I had the back interlocked doors of the machine open to do this (and I also opened the same doors on the AG4100 for comparison purposes), that may have somehow moved the system into an error condition as well. I also don't know how to reset that, but the doors are now properly closed, so that someone with better piloting skills can probably reset the sytem and software. p.s. I'm about to clear the shutdown related to this same issues. Thanks, John From riteshj at snf.stanford.edu Sat May 24 18:40:04 2008 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Sat, 24 May 2008 18:40:04 -0700 Subject: Problem AG4108 SNF 2008-05-24 18:40:03: Overtemp top plate errors / won't run Message-ID: The problem still exists. John think it might need a reset in the software with respect to the termocouple switch. As of now the mchine wont run. From cbaxter at snf.stanford.edu Sun May 25 10:51:04 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 25 May 2008 10:51:04 -0700 Subject: Problem AG4108 SNF 2008-05-24 18:40:03: Overtemp top plate errors / won't run Message-ID: John and I found lower overtemp switch tripped, reset o/t switch and we also changed the cooling line to stainless steel and copper tubing for the top cooling plate output. From emyers at snf.stanford.edu Fri May 30 14:56:09 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 30 May 2008 14:56:09 -0700 Subject: Comment AG4108 SNF 2008-05-30 14:56:09: Process Qual Data 5/30/08 Message-ID: 5/30/2008: Following Chamber Clean and Re-cal, 9 Pt's Wfr1: 118.49 Avg, 2.4188% Std dev Wfr2: Missing Wfr3: 131.68 Avg, 2.1286% Std dev Wfr4: 130.05 Avg, 1.937% Std dev Wfr5: 156.33 Avg, 24.3% Std dev, Wfr 5 has heavy slip lines and damage around the edges which is not normal. From emyers at snf.stanford.edu Fri May 30 14:57:26 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 30 May 2008 14:57:26 -0700 Subject: Problem AG4108 SNF 2008-02-29 08:43:51: Needs process qualification Message-ID: Completed 5/30/08 after significant chamber water flow problems between the AG4100 and AG4108. FAILED PROCESS QUAL From emyers at snf.stanford.edu Fri May 30 14:59:33 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 30 May 2008 14:59:33 -0700 Subject: Shutdown AG4108 SNF 2008-05-30 14:59:33: FAILED PROCESS QUAL Message-ID: The system failed process qual. The average thickness was 20-30% to high and there was significant problems with the 5th wafer ran which seems to be temperature related. This wafer was also sigificantly thicker oxide (higher effective temperature) than the four previous wafers. From shott at snf.stanford.edu Sat May 31 08:09:09 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 31 May 2008 08:09:09 -0700 Subject: Comment AG4108 SNF 2008-05-23 14:12:23: Chiller Message-ID: Chiller has been running at about 120 PSI for some time and is currently set with enough process cooling water to keep it at 63 degrees F (when the tools are not running).