Shutdown AG4108 SNF 2008-05-23 18:18:55: Over Temp Switch

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri May 23 18:18:56 PDT 2008


The chiller is running.  There is an Oven Temperature, Top Plate error which I can not clear.  It happened last night on the 20th wafer of a 1050C, 30 sec anneal.  I restrarted the software 2 times, but the error will not clear.  The system was in process last night when it lost the cooling water.  Maybe taking out the thermal switch.




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