From shott at snf.stanford.edu Sat Nov 1 11:22:06 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:22:06 -0700 Subject: Shutdown AG4108 SNF 2008-10-24 09:53:56: Ciller Failure Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:22:29 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:22:29 -0700 Subject: Problem AG4108 SNF 2008-08-18 15:24:41: Restarted system Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:22:39 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:22:39 -0700 Subject: Comment AG4108 SNF 2008-08-28 12:29:38: Update Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:22:48 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:22:48 -0700 Subject: Problem AG4108 SNF 2008-08-29 13:56:20: Temperature Failures Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:22:57 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:22:57 -0700 Subject: Comment AG4108 SNF 2008-09-05 12:34:20: Computer keeps beeping Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:23:05 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:23:05 -0700 Subject: Comment AG4108 SNF 2008-09-10 03:57:46: loud alarm Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:23:14 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:23:14 -0700 Subject: Problem AG4108 SNF 2008-09-13 20:56:52: over temperature top plate Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:23:24 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:23:24 -0700 Subject: Problem AG4108 SNF 2008-10-08 12:47:00: over temperature top plate Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:23:31 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:23:31 -0700 Subject: Comment AG4108 SNF 2008-10-10 10:33:27: Update over-temp Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:23:39 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:23:39 -0700 Subject: Comment AG4108 SNF 2008-10-24 12:42:21: Update on Chiller failure Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:24:59 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:24:59 -0700 Subject: Comment AG4108 SNF 2007-10-25 16:33:12: Oxide Qual Data Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:25:06 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:25:06 -0700 Subject: Comment AG4108 SNF 2008-01-07 08:07:17: Flat Aligner Not Working Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:25:12 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:25:12 -0700 Subject: Comment AG4108 SNF 2008-06-02 20:13:06: Process Qual Data 06/02/2008 Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:25:20 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:25:20 -0700 Subject: Problem AG4108 SNF 2008-07-11 20:08:45: still has problem with "plate overtemp" alarm Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From emyers at snf.stanford.edu Mon Nov 3 09:34:16 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 3 Nov 2008 09:34:16 -0800 Subject: Problem AG4108 SNF 2008-11-03 09:34:13: Temperature Faults Message-ID: There is still a high probability of the chamber faulting out for top plate overtemperature. Make sure you verify the tool before running critial wafers. From jrjain at snf.stanford.edu Mon Nov 3 17:54:57 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Mon, 3 Nov 2008 17:54:57 -0800 Subject: Shutdown AG4108 SNF 2008-11-03 17:54:57: Qual Failed: Top Plate Overtemp Message-ID: In order to diagnose temperature problems, skoh and I loaded a cassette of 25 wafers to run the QUAL1150 recipe. The system aborted after finishing the third wafer and gave the top plate overtemp error. The wafer had finished the high-temp step and was about to be unloaded (automatically). The run data are located in QUAL/3NOV2008 folder. System needs maintenance. From eenriquez at snf.stanford.edu Wed Nov 12 16:50:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Nov 2008 16:50:45 -0800 Subject: Comment AG4108 SNF 2008-11-12 16:50:44: Update over temp Message-ID: Field service will remove the oven assembly early next week after they are done with the 4100. They will also replace all the cooling lines.