Problem AG4108 SNF 2008-11-03 09:34:13: Temperature Faults

emyers at snf.stanford.edu emyers at snf.stanford.edu
Mon Nov 3 09:34:16 PST 2008


There is still a high probability of the chamber faulting out for top plate overtemperature.  Make sure you verify the tool before running critial wafers.




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