Shutdown AG4108 SNF 2008-11-03 17:54:57: Qual Failed: Top Plate Overtemp

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Mon Nov 3 17:54:57 PST 2008


In order to diagnose temperature problems, skoh and I loaded a cassette of 25 wafers to run the QUAL1150 recipe.  The system aborted after finishing the third wafer and gave the top plate overtemp error.  The wafer had finished the high-temp step and was about to be unloaded (automatically).  The run data are located in QUAL/3NOV2008 folder.  System needs maintenance.




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