From eenriquez at snf.stanford.edu Tue Apr 28 14:56:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Apr 2009 14:56:47 -0700 Subject: Comment AG4108 SNF 2009-04-28 14:56:47: Update overtemp problem Message-ID: Ran several test: Qual 1150 overtemps after 2 wafers (top plate temp ~ 90 C). RTA 700 overtemps after 8 wafers. Checked water flow through the top plate by disconnecting the return water line. Had virtually NO water flow with lots of green sand !@#!! Need to clear the top plate water channels. Also need to verify water flow through the rest of the chamber. From eenriquez at snf.stanford.edu Wed Apr 29 18:42:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Apr 2009 18:42:16 -0700 Subject: Comment AG4108 SNF 2009-04-29 18:42:15: Update overtemp Message-ID: Flushed out the top plate, now can get about 1 gal/ min of flow just through the top plate. Flushing out the rest of the lines. Now have cleaned 5 out of the 7 cooling loops. Need to finish flushing and then reassemble and test. From eenriquez at snf.stanford.edu Wed Apr 29 18:49:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Apr 2009 18:49:16 -0700 Subject: Shutdown AG4108 SNF 2009-04-29 18:49:15: Overtemp Message-ID: From eenriquez at snf.stanford.edu Thu Apr 30 14:47:25 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 30 Apr 2009 14:47:25 -0700 Subject: Comment AG4108 SNF 2009-04-30 14:47:25: Update over temp problem Message-ID: Ran 10 wafers using the Qual 1150 recipe. The top plate temperature cycled between 25 C to 34 C. Before the line clean, the top plate reached 60 C after the 1st wafer and overtemped after the 2nd. Just turned the water booster pump on. Now flowing about 3.2 gpm. Will run more test tomorrow.