Comment AG4108 SNF 2009-04-28 14:56:47: Update overtemp problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Apr 28 14:56:47 PDT 2009


Ran several test:  Qual 1150 overtemps after 2 wafers (top plate temp ~ 90 C).  RTA 700 overtemps after 8 wafers.
Checked water flow through the top plate by disconnecting the return water line.  Had virtually NO water flow with lots of green sand !@#!!
Need to clear the top plate water channels.  Also need to verify water flow through the rest of the chamber.




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