Comment AG4108 SNF 2009-04-30 14:47:25: Update over temp problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Apr 30 14:47:25 PDT 2009


Ran 10 wafers using the Qual 1150 recipe.  The top plate temperature cycled between 25 C to 34 C.  Before the line clean, the top plate reached 60 C after the 1st wafer and overtemped after the 2nd.
Just turned the water booster pump on.  Now flowing about 3.2 gpm.  Will run more test tomorrow.




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