From cursive at snf.stanford.edu  Thu Dec  3 14:47:25 2009
From: cursive at snf.stanford.edu (cursive at snf.stanford.edu)
Date: Thu, 3 Dec 2009 14:47:25 -0800
Subject: Problem AG4108 SNF 2009-12-03 14:47:24: pyrometer
Message-ID: <mailman.722.1356280555.3222.ag4108-pcs@snf.stanford.edu>

over temperature at pyrometer.



From emyers at snf.stanford.edu  Thu Dec  3 15:49:37 2009
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Thu, 3 Dec 2009 15:49:37 -0800
Subject: Problem AG4108 SNF 2009-12-03 15:49:36: Top Plate Overtemp
Message-ID: <mailman.723.1356280555.3222.ag4108-pcs@snf.stanford.edu>

The logs show a top plate overtemp for the 4th wafer running a 1000C recipe.  The water flow is ~1.5 gpm.  Is our friendly clog back.



From jhaydon at snf.stanford.edu  Fri Dec 11 11:25:40 2009
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Fri, 11 Dec 2009 11:25:40 -0800
Subject: Comment AG4108 SNF 2009-12-11 11:25:40: N2O
Message-ID: <mailman.724.1356280555.3222.ag4108-pcs@snf.stanford.edu>

Nitrous Oxide is not available at this time.