Problem AG4108 SNF 2009-12-03 15:49:36: Top Plate Overtemp

emyers at snf.stanford.edu emyers at snf.stanford.edu
Thu Dec 3 15:49:37 PST 2009


The logs show a top plate overtemp for the 4th wafer running a 1000C recipe.  The water flow is ~1.5 gpm.  Is our friendly clog back.




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