Comment AG4108 SNF 2009-06-19 14:52:28: Update needs service

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jun 19 14:52:29 PDT 2009


Cleaned the chamber and flushed out the top and side plates.  The top plate was badly clogged again.  Did not have time to flush-out the remaining 5 lines but based on their condition from the last time I flushed them, the top and side plates were the worst.
Did not have any clean wafers to cycle.  Ritesh will try to qualify the system.




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