Problem AG4108 SNF 2009-03-06 04:49:08: overtemp hot plate

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Fri Mar 6 04:49:08 PST 2009

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tried to run RTA1000 1 min

Previous message: Problem AG4108 SNF 2009-03-04 01:04:23: overtemp top plate on 1st wafer
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