Problem AG4108 SNF 2009-05-22 01:24:44: Plate overtemp problem

nvgirish at snf.stanford.edu nvgirish at snf.stanford.edu
Fri May 22 01:24:45 PDT 2009


Ran 1000C 30 sec RTA. After 3 wafers, plate temp error comes up. HAve to wait 10-15 min before starting again.




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