From eenriquez at snf.stanford.edu Fri Oct 2 15:57:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Oct 2009 15:57:35 -0700 Subject: Comment AG4108 SNF 2009-10-02 15:57:35: Update Message-ID: Purged out cooling water lines and ran pyrometer calibration. Pyrometer temperature is about 200 C less than TC temp. Need to troubleshoot. From eenriquez at snf.stanford.edu Tue Oct 6 15:21:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Oct 2009 15:21:33 -0700 Subject: Comment AG4108 SNF 2009-10-06 15:21:33: Update Message-ID: Checked the chamber, the pyrometer window and the pyrometer for any obstructions. None found. Ran another pyrometer cal. During testing, the pyrometer reading initially matched the tc temperature but it steadily dropped after about 10 sec. Need further troubleshooting. From eenriquez at snf.stanford.edu Wed Oct 7 18:09:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 7 Oct 2009 18:09:27 -0700 Subject: Comment AG4108 SNF 2009-10-07 18:09:27: Update Message-ID: Pyrometer temperature reading more closely matches the TC temp after adjusting the tube temperature offsets. Noticed that most of the electronic rack's cooling fans are not working, will replace tomorrow. System should be up by 3 pm. From eenriquez at snf.stanford.edu Thu Oct 8 11:03:12 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:03:12 -0700 Subject: Comment AG4108 SNF 2009-08-24 15:17:42: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 11:03:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:03:16 -0700 Subject: Comment AG4108 SNF 2009-08-27 14:44:33: Updage Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 11:03:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:03:21 -0700 Subject: Comment AG4108 SNF 2009-10-02 15:57:35: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 11:03:25 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:03:25 -0700 Subject: Comment AG4108 SNF 2009-10-06 15:21:33: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 11:03:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:03:30 -0700 Subject: Comment AG4108 SNF 2009-10-07 18:09:27: Update Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 11:13:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:13:26 -0700 Subject: Shutdown AG4108 SNF 2009-08-18 16:56:33: Dirty Chamber Message-ID: Cleaned the chamber and performed pyrometer cal. In the pyrometer setup screen, I had to change the Tube 700C value from 1.5 to 0.6 and the Tube 1100C from 1.4 to 0.3. Also replaced all four of the electronics rack coolin fans. From eenriquez at snf.stanford.edu Thu Oct 8 11:13:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:13:44 -0700 Subject: Problem AG4108 SNF 2009-07-17 17:44:05: Over temp top plate problem Message-ID: Flushed out cooling water lines. From eenriquez at snf.stanford.edu Thu Oct 8 11:14:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:14:16 -0700 Subject: Problem AG4108 SNF 2009-10-08 11:14:16: Needs process qualification Message-ID: From eenriquez at snf.stanford.edu Thu Oct 8 11:15:32 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:15:32 -0700 Subject: Problem AG4108 SNF 2009-06-09 08:27:15: Low Water Flow Message-ID: Cleaned the chamber's water channels and replaced cooling water lines. From eenriquez at snf.stanford.edu Thu Oct 8 11:15:54 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:15:54 -0700 Subject: Problem AG4108 SNF 2009-06-11 08:47:28: Needs Service Message-ID: Cleaned the chamber. From eenriquez at snf.stanford.edu Thu Oct 8 11:16:06 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:16:06 -0700 Subject: Problem AG4108 SNF 2009-06-29 09:25:43: Need to run process qual Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 11:16:16 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:16:16 -0700 Subject: Comment AG4108 SNF 2009-06-19 14:52:28: Update needs service Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 11:16:25 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:16:25 -0700 Subject: Comment AG4108 SNF 2009-05-01 18:12:59: Process Qual Data Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 11:16:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:16:40 -0700 Subject: Comment AG4108 SNF 2009-06-26 17:48:41: Chilled water differential pressure .... Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 11:16:46 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:16:46 -0700 Subject: Comment AG4108 SNF 2009-06-30 17:31:20: Process Qual but with Over Temp error during qual Message-ID: Archived From shott at snf.stanford.edu Fri Oct 9 05:51:38 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 9 Oct 2009 05:51:38 -0700 Subject: Problem AG4108 SNF 2009-10-08 11:14:16: Needs process qualification Message-ID: Following work by Mike and Elmer to purge out the cooling lines and then get the pyrometer back in shape, I ran a full cassette of wafers using the 1150QUAL run. The first bit of good news is that I was able to run all 25 wafers without any interlock problem or "Top Plate Errors". As we now have a separate K-type thermocouple affixed to the top plate, I was able to monitor the temperature of the plate for each wafer and to note both the minimum temperature (that occurs just as the lamp come on) and the maximum temperature that occurs just a couple of seconds after the lamps go out. After the first 3-4 wafers while the system is still warming up, the minimum top plate temperature was observed to be fairly repeatable between about 31.9 C and 32.6 C .... in fact, most of the wafers reached 31.2C +/- 0.2C. The maximum temperature also seemed fairly tightly distributed in the range of 42.4 C to 43.7 C. This seems pretty significantly better than we have observed recently .... and 11 C increase in temperature during the run seems quite acceptable as the overtemp switches are set to trip at about 65 C. A couple of other relevant facts. The supply and return coolant pressures were 72 and 40 PSI, respectively and the coolant flow was measured to be 1.8 GPM (measured by the big plexiglass flowmeter in the fingerwall). During these runs the average lamp intensity to reach 1150 degree C was about 41%. I'm going to clear this problem in terms of cooling .... but submit another one related to an apparently thin oxide. John From shott at snf.stanford.edu Fri Oct 9 05:59:04 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 9 Oct 2009 05:59:04 -0700 Subject: Problem AG4108 SNF 2009-10-09 05:59:04: Thin oxides for QUAL1150 .... Message-ID: Preliminary measurements of the oxide thickness of the QUAL1150 look significantly thinner than they should. Also, based on imput from Peter Griffin, they appear to fall in a range where it is very difficult to accurately determine the thickness and index. When I use the program that determines both thickness and refractive index I get: Wafer Thickness Refractive Index 1 62.5 1.999 6 65.1 2.084 11 63.7 2.096 16 62.1 2.046 21 64.8 2.025 When I assume the index is 1.46 I get: Wafer Thickness 1 75.5 6 78.8 11 76.5 16 74.8 21 78.2 Peter Griffin notes that these measurement both have the same Psi and Del: index thick psi del 1.46 75 10.88 157.98 2.00 65 10.79 156.85 While I will confirm that we DO have an oxide layer by etching in 50:1 HF, I think that we may have some sort of temperature and/or pyrometer calibration problem. Thanks, John From emyers at snf.stanford.edu Fri Oct 9 15:28:46 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 9 Oct 2009 15:28:46 -0700 Subject: Problem AG4108 SNF 2009-10-09 15:28:46: Qual Failed, Too Thick Message-ID: Elmer reset the calibration numbers to the prior values. This time the thickness came out too thick. Wfr 1: t=121.01 Ang., Std Dev: 3.58 Wfr 2: t=153.63 Ang., Std Dev: 5.38 Wfr 3: t=148.91 Ang., Std Dev: 3.15 Wfr 4: t=141.42 Ang., Std Dev: 2.74 Wfr 5: t=144.60 Ang., Std Dev: 5.16 By rights the tool should be in shutdown for failing qual. From eenriquez at snf.stanford.edu Fri Oct 9 15:48:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Oct 2009 15:48:38 -0700 Subject: Comment AG4108 SNF 2009-10-09 15:48:38: Update Message-ID: Contacted field service and asked them to come in next Monday. Will give an update when field service arrival is confirmed. From eenriquez at snf.stanford.edu Mon Oct 12 15:16:54 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Oct 2009 15:16:54 -0700 Subject: Comment AG4108 SNF 2009-10-12 15:16:53: Update Message-ID: Field service will be here tomorrow by 11am. From emyers at snf.stanford.edu Wed Oct 14 10:05:45 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 14 Oct 2009 10:05:45 -0700 Subject: Comment AG4108 SNF 2009-10-14 10:05:44: Oct.14 09 Update Message-ID: I am still concerned about the calibration. In talking with Allwin FSE, I heard I comment I was not confortable with regarding the function of the calibration. I am in discussion with Allwin regarding the comment. This morning Elmer ran the system in manual to compare the TC and pyrometer temperatures. The difference at low temperature is unacceptable. At 900C there is good agreement and at 1100C it's with 10C or so. I feel we still need to work on the system to get the TC and pyro reading to converge.