Problem AG4108 SNF 2009-10-09 15:28:46: Qual Failed, Too Thick

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri Oct 9 15:28:46 PDT 2009


Elmer reset the calibration numbers to the prior values.  This time the thickness came out too thick.  
Wfr 1:  t=121.01 Ang., Std Dev: 3.58
Wfr 2:  t=153.63 Ang., Std Dev: 5.38
Wfr 3:  t=148.91 Ang., Std Dev: 3.15
Wfr 4:  t=141.42 Ang., Std Dev: 2.74
Wfr 5:  t=144.60 Ang., Std Dev: 5.16
By rights the tool should be in shutdown for failing qual.




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