From narii at snf.stanford.edu Sat Apr 10 17:33:33 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 10 Apr 2010 17:33:33 -0700 Subject: Problem AG4108 SNF 2010-04-10 17:33:33: Water leaks Message-ID: Water leaks from the left side of chamber door. From ajamo at snf.stanford.edu Sun Apr 11 01:44:00 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 11 Apr 2010 01:44:00 -0700 Subject: Shutdown AG4108 SNF 2010-04-11 01:44:00: water squirting on rt side of door Message-ID: Previous user also saw this. I was running RTA_500.rcp. It overtemped and when I watched the wafer unload, there is a tube on the outside rt side of the door that is squirting water on the front of the door. From ajamo at snf.stanford.edu Sun Apr 11 01:44:43 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 11 Apr 2010 01:44:43 -0700 Subject: Problem AG4108 SNF 2010-04-11 01:44:42: no N2O Message-ID: Tried to run a recipe with N2O, it was not flowing. From cbaxter at snf.stanford.edu Sun Apr 11 10:49:44 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 11 Apr 2010 10:49:44 -0700 Subject: Shutdown AG4108 SNF 2010-04-11 01:44:00: water squirting on rt side of door Message-ID: Changed tygon tubing on door cooling line.. From cbaxter at snf.stanford.edu Sun Apr 11 10:50:27 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 11 Apr 2010 10:50:27 -0700 Subject: Problem AG4108 SNF 2010-04-11 01:44:42: no N2O Message-ID: Reseated mfc cable.. From cbaxter at snf.stanford.edu Sun Apr 11 10:50:33 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 11 Apr 2010 10:50:33 -0700 Subject: Problem AG4108 SNF 2010-04-10 17:33:33: Water leaks Message-ID: From cbaxter at snf.stanford.edu Sun Apr 11 12:14:06 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 11 Apr 2010 12:14:06 -0700 Subject: Shutdown AG4108 SNF 2010-04-11 12:14:05: Flushing cooling line.. Message-ID: From cbaxter at snf.stanford.edu Sun Apr 11 12:36:14 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 11 Apr 2010 12:36:14 -0700 Subject: Comment AG4108 SNF 2010-04-11 12:36:13: Top Plate Message-ID: The top plate cooling line is plugged, just like the 4100. From cbaxter at snf.stanford.edu Mon Apr 12 13:29:44 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Apr 2010 13:29:44 -0700 Subject: Shutdown AG4108 SNF 2010-04-11 12:14:05: Flushing cooling line.. Message-ID: Flushed top cooling plate.. From cbaxter at snf.stanford.edu Mon Apr 12 13:29:52 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Apr 2010 13:29:52 -0700 Subject: Comment AG4108 SNF 2010-04-11 12:36:13: Top Plate Message-ID: From cbaxter at snf.stanford.edu Mon Apr 12 13:30:11 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Apr 2010 13:30:11 -0700 Subject: Problem AG4108 SNF 2010-02-10 11:21:10: Overtemp Message-ID: Flushed top cooling plate.. From ajamo at snf.stanford.edu Tue Apr 13 05:00:07 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Tue, 13 Apr 2010 05:00:07 -0700 Subject: Problem AG4108 SNF 2010-04-13 05:00:06: no N2O Message-ID: No N2O flowing From emyers at snf.stanford.edu Wed Apr 14 11:02:52 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 14 Apr 2010 11:02:52 -0700 Subject: Problem AG4108 SNF 2010-04-13 05:00:06: no N2O Message-ID: Opened the gas valve in the system's gas box. From cursive at snf.stanford.edu Tue Apr 20 17:06:38 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Tue, 20 Apr 2010 17:06:38 -0700 Subject: Problem AG4108 SNF 2010-04-20 17:06:37: large lamp intensity vibration Message-ID: running 1050'C 2min anneal, the lamp intensity vibrate huge. Temperature range is between 1030 to 1070'C. After 100sec, it started to stay at steady state. Is the lamp problem? From cursive at snf.stanford.edu Wed Apr 21 09:05:20 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 21 Apr 2010 09:05:20 -0700 Subject: Comment AG4108 SNF 2010-04-21 09:05:20: The recipei I ran yesterday was "NH3_1050" Message-ID: From emyers at snf.stanford.edu Wed Apr 21 13:54:40 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 21 Apr 2010 13:54:40 -0700 Subject: Problem AG4108 SNF 2010-04-20 17:06:37: large lamp intensity vibration Message-ID: I looked at the results and the recipe. I think this is a recipe problem. The steady state intensity factor is set at 1.30 against the recommended starting point of 1.0. When you see oscilations at steady state usually we lower the setting to dampen the response. In the header data the gain is set to 0.40 (common for the 4100) against a recommended 0.30 (for the 4108). Finally again in the header the sensitivity is set o 2.0 instead of 1.0. If you make these changes to the recipe you should see the ringing of the lamp intensity from over driving the PID control parameters. From emyers at snf.stanford.edu Wed Apr 21 13:55:16 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 21 Apr 2010 13:55:16 -0700 Subject: Comment AG4108 SNF 2010-04-21 09:05:20: The recipei I ran yesterday was "NH3_1050" Message-ID: Reviewed recipe and made comments in the problem report.