Shutdown AG4108 SNF 2010-04-11 01:44:00: water squirting on rt side of door

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Sun Apr 11 01:44:00 PDT 2010


Previous user also saw this.  I was running RTA_500.rcp.  It overtemped and when I watched the wafer unload, there is a tube on the outside rt side of the door that is squirting water on the front of the door. 




More information about the AG4108-pcs mailing list