From emyers at snf.stanford.edu  Mon Feb  8 15:18:12 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Mon, 8 Feb 2010 15:18:12 -0800
Subject: Problem AG4108 SNF 2010-02-08 15:18:11: Needs Qual after Chamber Clean
Message-ID: <mailman.726.1356280555.3222.ag4108-pcs@snf.stanford.edu>

Chamber cleaned and reassembled. Needs test.  Orginal comment was placed on the AG4100 by mistake.



From mdickey at snf.stanford.edu  Tue Feb  9 07:34:54 2010
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 9 Feb 2010 07:34:54 -0800
Subject: Shutdown AG4108 SNF 2010-02-09 07:34:53: Robot
Message-ID: <mailman.727.1356280555.3222.ag4108-pcs@snf.stanford.edu>

robot does not power up



From eenriquez at snf.stanford.edu  Tue Feb  9 11:42:11 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 9 Feb 2010 11:42:11 -0800
Subject: Shutdown AG4108 SNF 2010-02-09 07:34:53: Robot
Message-ID: <mailman.728.1356280555.3222.ag4108-pcs@snf.stanford.edu>

Reset the system.  Process still needs to be qualified



From emyers at snf.stanford.edu  Wed Feb 10 11:21:11 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 10 Feb 2010 11:21:11 -0800
Subject: Problem AG4108 SNF 2010-02-10 11:21:10: Overtemp
Message-ID: <mailman.729.1356280555.3222.ag4108-pcs@snf.stanford.edu>

Could not complete qual as system overtemp'd after 3rd wafer (30 sec @1150C).  QUAL requires 5 wafers



From emyers at snf.stanford.edu  Wed Feb 10 16:48:14 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 10 Feb 2010 16:48:14 -0800
Subject: Comment AG4108 SNF 2010-02-10 16:48:13: Qual Feb. 10, 2010
Message-ID: <mailman.730.1356280555.3222.ag4108-pcs@snf.stanford.edu>

Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. 
wafer 1: Avg 86 SD 4.6
wafer 2: Avg 106 SD 4.3
wafer 3: Avg 108 SD 4.6
System Over Temp'd
wafer 4: Not Ran
wafer 5: Not Ran
Typically I would expect values closer to 120 Ang.  System running a little cold.



From emyers at snf.stanford.edu  Wed Feb 24 15:37:53 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 24 Feb 2010 15:37:53 -0800
Subject: Problem AG4108 SNF 2010-02-08 15:18:11: Needs Qual after Chamber Clean
Message-ID: <mailman.731.1356280555.3222.ag4108-pcs@snf.stanford.edu>

Qual ran on Feb. 10th



From emyers at snf.stanford.edu  Wed Feb 24 15:39:04 2010
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Wed, 24 Feb 2010 15:39:04 -0800
Subject: Problem AG4108 SNF 2009-12-03 14:47:24: pyrometer
Message-ID: <mailman.732.1356280555.3222.ag4108-pcs@snf.stanford.edu>

Most often this occurs because of a recipe problem.  If the lab member lets me know what recipe I will be happy to work with them.