Comment AG4108 SNF 2010-02-10 16:48:13: Qual Feb. 10, 2010

emyers at snf.stanford.edu emyers at snf.stanford.edu
Wed Feb 10 16:48:14 PST 2010


Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. 
wafer 1: Avg 86 SD 4.6
wafer 2: Avg 106 SD 4.3
wafer 3: Avg 108 SD 4.6
System Over Temp'd
wafer 4: Not Ran
wafer 5: Not Ran
Typically I would expect values closer to 120 Ang.  System running a little cold.




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