Comment AG4108 SNF 2010-02-10 16:48:13: Qual Feb. 10, 2010

[emyers at snf.stanford.edu]

Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. 
wafer 1: Avg 86 SD 4.6
wafer 2: Avg 106 SD 4.3
wafer 3: Avg 108 SD 4.6
System Over Temp'd
wafer 4: Not Ran
wafer 5: Not Ran
Typically I would expect values closer to 120 Ang.  System running a little cold.