From bchui at snf.stanford.edu Fri Jul 9 01:10:27 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 9 Jul 2010 01:10:27 -0700 Subject: Comment AG4108 SNF 2010-07-09 01:10:27: Worked great Message-ID: 12 wafers, 1000C RTA in N2 for 20 seconds each