From cursive at snf.stanford.edu Sun Jun 6 20:15:24 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 6 Jun 2010 20:15:24 -0700 Subject: Comment AG4108 SNF 2010-06-06 20:15:23: update? Message-ID: Can anyone update the status? From cursive at snf.stanford.edu Fri Jun 11 15:52:09 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 11 Jun 2010 15:52:09 -0700 Subject: Problem AG4108 SNF 2010-06-11 15:52:09: Can any one update the status? Message-ID: Can any staff update the status? The mahcine is down for several weeks. From cbaxter at snf.stanford.edu Sun Jun 13 20:18:15 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 13 Jun 2010 20:18:15 -0700 Subject: Problem AG4108 SNF 2010-06-11 15:52:09: Can any one update the status? Message-ID: Completed flushing upper and lower chamber cooling lines. Now cooling flow is 2gpm.. From cbaxter at snf.stanford.edu Sun Jun 13 20:18:28 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 13 Jun 2010 20:18:28 -0700 Subject: Shutdown AG4108 SNF 2010-05-24 08:33:02: Flushing cooling lines Message-ID: From cbaxter at snf.stanford.edu Sun Jun 13 20:19:44 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 13 Jun 2010 20:19:44 -0700 Subject: Comment AG4108 SNF 2010-06-13 20:19:43: Qual Message-ID: System needs process qual... From emyers at snf.stanford.edu Mon Jun 14 11:08:12 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:08:12 -0700 Subject: Problem AG4108 SNF 2010-06-14 11:08:11: Failed Qual, Overtemp Message-ID: Could not complete qual as system overtemp'd after 3rd wafer (30 sec @1150C). QUAL requires 5 wafers. The area of the chamber monitored by the T1 sensor held around 30C during processing. The area monitored by T2 temperature climbed >20C for each wafer. While we are getting right at 2 gpm, it seems the T2 area does not have enough flow. From emyers at snf.stanford.edu Mon Jun 14 11:09:09 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:09:09 -0700 Subject: Problem AG4108 SNF 2009-10-09 05:59:04: Thin oxides for QUAL1150 .... Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 14 11:09:28 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:09:28 -0700 Subject: Problem AG4108 SNF 2009-10-09 15:28:46: Qual Failed, Too Thick Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 14 11:09:42 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:09:42 -0700 Subject: Problem AG4108 SNF 2009-12-03 15:49:36: Top Plate Overtemp Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 14 11:10:05 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:10:05 -0700 Subject: Comment AG4108 SNF 2009-10-09 15:48:38: Update Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 14 11:10:16 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:10:16 -0700 Subject: Comment AG4108 SNF 2009-10-12 15:16:53: Update Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 14 11:10:39 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:10:39 -0700 Subject: Comment AG4108 SNF 2009-10-14 10:05:44: Oct.14 09 Update Message-ID: Archived From emyers at snf.stanford.edu Mon Jun 14 11:11:18 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:11:18 -0700 Subject: Comment AG4108 SNF 2010-06-13 20:19:43: Qual Message-ID: Ran qual. Failed for chamber overtemp while loading 4th wafer. From emyers at snf.stanford.edu Mon Jun 14 11:11:35 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:11:35 -0700 Subject: Comment AG4108 SNF 2010-05-31 16:45:13: Update Message-ID: archived From emyers at snf.stanford.edu Mon Jun 14 11:11:48 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:11:48 -0700 Subject: Comment AG4108 SNF 2010-05-31 16:46:40: Update Message-ID: archived From emyers at snf.stanford.edu Mon Jun 14 11:12:00 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:12:00 -0700 Subject: Comment AG4108 SNF 2010-06-06 20:15:23: update? Message-ID: archived From emyers at snf.stanford.edu Mon Jun 14 11:15:36 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jun 2010 11:15:36 -0700 Subject: Comment AG4108 SNF 2010-06-14 11:15:35: June 14, 2010 Qual Message-ID: Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. wafer 1: Avg 107 SD 4.9 wafer 2: Avg 104 SD 4.8 wafer 3: Avg 105 SD 4.2 System Over Temp'd wafer 4: Not Ran wafer 5: Not Ran Typically I would expect values closer to 120 Ang. System running a little cold.