Problem AG4108 SNF 2010-06-14 11:08:11: Failed Qual, Overtemp

emyers at snf.stanford.edu emyers at snf.stanford.edu
Mon Jun 14 11:08:12 PDT 2010


Could not complete qual as system overtemp'd after 3rd wafer (30 sec @1150C).  QUAL requires 5 wafers.  The area of the chamber monitored by the T1 sensor held around 30C during processing.  The area monitored by T2 temperature climbed >20C for each wafer.  While we are getting right at 2 gpm, it seems the T2 area does not have enough flow.




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