Comment AG4108 SNF 2010-06-13 20:19:43: Qual
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Mon Jun 14 11:11:18 PDT 2010
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Comment AG4108 SNF 2010-06-13 20:19:43: Qual
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Problem AG4108 SNF 2010-06-14 11:08:11: Failed Qual, Overtemp
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Ran qual. Failed for chamber overtemp while loading 4th wafer.
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Comment AG4108 SNF 2010-06-13 20:19:43: Qual
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Problem AG4108 SNF 2010-06-14 11:08:11: Failed Qual, Overtemp
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