Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. wafer 1: Avg 107 SD 4.9 wafer 2: Avg 104 SD 4.8 wafer 3: Avg 105 SD 4.2 System Over Temp'd wafer 4: Not Ran wafer 5: Not Ran Typically I would expect values closer to 120 Ang. System running a little cold.