Comment AG4108 SNF 2010-06-14 11:15:35: June 14, 2010 Qual

emyers at snf.stanford.edu emyers at snf.stanford.edu
Mon Jun 14 11:15:36 PDT 2010


Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. 
wafer 1: Avg 107 SD 4.9
wafer 2: Avg 104 SD 4.8
wafer 3: Avg 105 SD 4.2
System Over Temp'd
wafer 4: Not Ran
wafer 5: Not Ran
Typically I would expect values closer to 120 Ang.  System running a little cold.




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