From wslee at snf.stanford.edu  Tue Jan 11 05:42:19 2011
From: wslee at snf.stanford.edu (wslee at snf.stanford.edu)
Date: Tue, 11 Jan 2011 05:42:19 -0800
Subject: Problem AG4108 SNF 2011-01-11 05:42:19: top plate overheating alarm
Message-ID: <mailman.781.1356280556.3222.ag4108-pcs@snf.stanford.edu>

I was running a 1075 RTA for 30 sec.  I could only do 1-2 wafers at a time and then the top plate would overheat.  Then I had to wait a few minutes for that to cool down before continuing.