Problem AG4108 SNF 2011-01-11 05:42:19: top plate overheating alarm

wslee at wslee at
Tue Jan 11 05:42:19 PST 2011

I was running a 1075 RTA for 30 sec.  I could only do 1-2 wafers at a time and then the top plate would overheat.  Then I had to wait a few minutes for that to cool down before continuing.

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