Problem AG4108 SNF 2011-01-11 05:42:19: top plate overheating alarm

wslee at snf.stanford.edu wslee at snf.stanford.edu
Tue Jan 11 05:42:19 PST 2011


I was running a 1075 RTA for 30 sec.  I could only do 1-2 wafers at a time and then the top plate would overheat.  Then I had to wait a few minutes for that to cool down before continuing.




More information about the AG4108-pcs mailing list