From shott at snf.stanford.edu  Wed Aug  9 16:58:05 2000
From: shott at snf.stanford.edu (John Shott)
Date: Wed, 09 Aug 2000 16:58:05 -0700
Subject: AG4108 mailing list test ... please ignore.
Message-ID: <3991F00D.BF08C512@snf.stanford.edu>

We have been having problems with the AG4108 mailing list ... I am trying to
fix them.

Please disregard this message ... 

John


From booth at snf.stanford.edu  Tue Aug 15 13:42:29 2000
From: booth at snf.stanford.edu (Len Booth)
Date: Tue, 15 Aug 2000 13:42:29 -0700
Subject: AG4108 status 8/15/00
Message-ID: <3999AB35.AA0E2DF1@snf.stanford.edu>

Users -

The faulty wafer aligner on our AG4108 was removed
from the machine this morning, and is being shipped
to the OEM for expedited evaluation & repair.
If repairs are done as quoted, then we should have the
unit back here at Stanford about Tuesday next week
(Aug 22nd) to reinstall in our annealer, adjust for
any robot handling changes, and verify normal
wafer handling and process.
			Len


From booth at snf.stanford.edu  Thu Aug 24 14:11:20 2000
From: booth at snf.stanford.edu (Len Booth)
Date: Thu, 24 Aug 2000 14:11:20 -0700
Subject: AG4108 status 08/24/00
Message-ID: <39A58F78.4AD17406@snf.stanford.edu>

AG4108 users -
	The machine is UP again and ready for 
public use.  Go ahead and reserve time on
CORAL and start processing.
	The flat aligner was repaired by the
vendor, and installed in the machine yesterday.
The wafer movement seems reliable now, and
Robin has run some oxidations to measure the
oxide thickness.  The average temperature is
as expected, with uniformity within 5%.
	The pyrometer chiller has been sent
out for repair; in the meantime we have
hooked up a temporaty chiller - it's located
on the floor behind the annealer.  Check that
the temperature readout on this chiller stays
at 15 degC during processing.  If it drifts
significantly, your wafer temps will probably
not be correct.
	If you notice any further problems,
use CORAL to notify us right away.
			Len