Quartz change

Len Booth booth at snf.stanford.edu
Mon Apr 9 07:47:27 PDT 2001


AG4108 users -
	This morning I changed the wafer tray & cassettes
in the AG4108, from oxidation to silicide.  Nabeel and
Pinkesh are still working on the cross-contamination
experiments, the results of which will determine if we
must still continue to change quartzware with the process,
or leave one set of quartzware for all processing.
			Len



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