Switching to Silicide tray

Yayoi Takamura takamura at stanford.edu
Tue Feb 13 11:24:22 PST 2001


AG4108 Users,
	I wanted to have Len switch the AG4108 over to the silicide tray
to do a few anneals.  I was checking to see if there were users who still
need to have the RTA AG4108 configured with the diffusion tray and what
their time line for running their wafers through there was.

Thanks,

Yayoi

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Yayoi Takamura
CISX Building, Room 300
Stanford University
Stanford, CA  94305
(650) 725-0418
takamura at leland.stanford.edu
www.stanford.edu/~takamura/
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