Changing quartzware

Robin King king at
Mon Jan 22 19:22:42 PST 2001

On a related note, there may be a change in policy regarding separate
diffusion and silicide trays.   If you have any comments please contact 
Jim McVittie or Krishna Saraswat so they have your input.  I believe
they're trying to simplify the quartzware procedures while maintaining
diffusion-clean standards.  They may be considering a change in allowed
materials as well.

Robin King

On Mon, 22 Jan 2001, Brian Joseph Greene wrote:

> Users,
>   I am planning to ask Len to change the AG4108 quartzware to the wbdiff
> clean quartzware THIS WEDNESDAY.  I sent out an email a couple of weeks
> ago warning users of this request.  The clean quartzware will remain
> installed for approximately one week.  Please let me know this causes any
> problems for any of you.
> Thank you,
> Brian
> _____________________________________________________________
>   Brian J. Greene                 Office: CIS-X 128X         
>   Applied Physics Dept, MC 4090   Phone: (650) 723-4194 ext 5 
>   Stanford University             Pager: (650) 354-9687       
>   Stanford, CA  94305-4090        Fax: (650) 723-4659 

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