Changing quartzware
Robin King
king at snf.stanford.edu
Mon Jan 22 19:22:42 PST 2001
On a related note, there may be a change in policy regarding separate
diffusion and silicide trays. If you have any comments please contact
Jim McVittie or Krishna Saraswat so they have your input. I believe
they're trying to simplify the quartzware procedures while maintaining
diffusion-clean standards. They may be considering a change in allowed
materials as well.
Robin King
On Mon, 22 Jan 2001, Brian Joseph Greene wrote:
> Users,
> I am planning to ask Len to change the AG4108 quartzware to the wbdiff
> clean quartzware THIS WEDNESDAY. I sent out an email a couple of weeks
> ago warning users of this request. The clean quartzware will remain
> installed for approximately one week. Please let me know this causes any
> problems for any of you.
>
> Thank you,
> Brian
>
> _____________________________________________________________
> Brian J. Greene Office: CIS-X 128X
> Applied Physics Dept, MC 4090 Phone: (650) 723-4194 ext 5
> Stanford University Pager: (650) 354-9687
> Stanford, CA 94305-4090 Fax: (650) 723-4659
>
>
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