Wafer tray changed to oxidation.

Len Booth booth at snf.stanford.edu
Thu Jan 25 14:21:40 PST 2001

Users -
	There was a meeting today at lunch for all
interested users of the AG4108.  Nabeel will be
sending out a synopsis of the issues discussed.  In
the meantime, as agreed at the meeting, I have changed
the quartz tray from silicide to oxidation.  I have
not changed the quartz chamber/tube.  Therefore the
machine is available for clean oxidation uses -
but not for silicide types of annealing.
For more info - see Nabeel's writeup (should be
written soon).		Len

More information about the AG4108 mailing list