Wafer tray changed to oxidation.
booth at snf.stanford.edu
Thu Jan 25 14:21:40 PST 2001
There was a meeting today at lunch for all
interested users of the AG4108. Nabeel will be
sending out a synopsis of the issues discussed. In
the meantime, as agreed at the meeting, I have changed
the quartz tray from silicide to oxidation. I have
not changed the quartz chamber/tube. Therefore the
machine is available for clean oxidation uses -
but not for silicide types of annealing.
For more info - see Nabeel's writeup (should be
written soon). Len
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