switch to silicide tray

Yayoi Takamura takamura at stanford.edu
Mon May 7 07:10:43 PDT 2001


Hi,
	I would like to switch the RTA AG4108 over to the silicide tray
perhaps later this week or next week for at least a couple of days.  I
wanted to check to see if there were people who would like to use the RTA
with the oxidation tray before the switch; and also if there were any
other people who would like to use the RTA with the silicide tray before it
is switched back to oxidation.

Thanks,

Yayoi

****************************************************************
Yayoi Takamura
CISX Building, Room 300
Stanford University
Stanford, CA  94305
(650) 725-0418
takamura at leland.stanford.edu
www.stanford.edu/~takamura/
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