From ibrahim at stanford.edu Mon Oct 1 17:23:41 2001 From: ibrahim at stanford.edu (Nabeel Ibrahim) Date: Mon, 1 Oct 2001 17:23:41 -0700 (PDT) Subject: AG4108: quartzware change Message-ID: I'd like to get the quartzware changed back to silicide on Weds. morning. If this presents a problem for you, please let me know ASAP. Nabeel From booth at snf.stanford.edu Thu Oct 4 07:43:07 2001 From: booth at snf.stanford.edu (Len Booth) Date: Thu, 04 Oct 2001 07:43:07 -0700 Subject: AG4108 quartzware change Message-ID: <3BBC757B.AB669F0F@snf.stanford.edu> Users - The quartzware & cassettes have been changed from oxidation to silicide, and the sign above the oven door has been changed. Len From hjcho at t-ram.com Thu Oct 11 13:54:16 2001 From: hjcho at t-ram.com (Hyun-Jin Cho) Date: Thu, 11 Oct 2001 13:54:16 -0700 Subject: Tray change to oxidation Message-ID: <09D9A35A159F1840B6B70EAD4E681A1D0439AB@gate.t-ram.com> I would like to ask Len to change the tray to oxidation tomorrow. Please let me know if there is a conflict. H.J. From booth at snf.stanford.edu Tue Oct 16 15:24:19 2001 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 16 Oct 2001 15:24:19 -0700 Subject: AG4108 quartzware change Message-ID: <3BCCB392.8608130E@snf.stanford.edu> Users - The quartzware for the AG4108 has been changed from silicide to oxidation, & the cassettes & the sign have been changed. Len From balaji at sunray.snffab.stanford.edu Thu Oct 18 16:46:54 2001 From: balaji at sunray.snffab.stanford.edu (Balaji Venkateshwaran) Date: Thu, 18 Oct 2001 16:46:54 -0700 (PDT) Subject: AG4108 uniformity run Message-ID: <200110182346.QAA19949@sunray.snffab.stanford.edu> Hi folks, I did an oxidation run in AG4108 to check heat uniformity across the wafer. Ran 3SLPM of Oxygen at 1150C for 30 sec. Here are the results: ############ ## 1 ## ## ## # 2 3 4 # # # # 5 6 7 8 9 # # # # 10 11 12 # # # # 13 # ## ## ############## (Flat) Nano Spec measurements Ellipsometer measurements (prog#7 = thin ox on Si) 1 = 180 A 1 = 171 A 2 = 187 A 2 = 177 A 3 = 177 A 3 = 172 A 4 = 180 A 4 = 173 A 5 = 175 A 5 = 170 A 6 = 193 A 6 = 176 A 7 = 188 A 7 = 176 A 8 = 178 A 8 = 178 A 9 = 170 A 9 = 172 A 10= 189 A 10= 176 A 11= 186 A 11= 177 A 12= 174 A 12= 177 A 13= 174 A 13= 175 A In summary, Nanospec and Ellipsometry measure slightly different values and I'm putting more faith in ellipsometry. Going by ellipsometry, thickness uniformity is around 5%. Balaji From ehkim at stanford.edu Fri Oct 19 14:32:11 2001 From: ehkim at stanford.edu (Eun-Ha Kim) Date: Fri, 19 Oct 2001 14:32:11 -0700 Subject: tray change to silicide ? Message-ID: <002a01c158e5$847c53a0$316340ab@EUN> Hi, I would like to ask Len to change the tray to silicde next Tuesday (10/23). Please let me know if there is a conflict. Thanks. ______________________________ Yours truly, Eun-Ha Kim CISX Building, Rm 300 Stanford University Stanford, CA 94305 Phone : (650) 725-0419 Email : ehkim at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: From sjain at stanford.edu Tue Oct 23 00:28:44 2001 From: sjain at stanford.edu (Sameer Hemchand Jain) Date: Tue, 23 Oct 2001 00:28:44 -0700 (PDT) Subject: tray change to silicide ? In-Reply-To: <002a01c158e5$847c53a0$316340ab@EUN> Message-ID: Hi, I would like to use the silicide tray in the RTA on friday and over teh weekend. Please let me know if there is any conflict. Sameer From booth at snf.stanford.edu Tue Oct 23 11:16:18 2001 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 23 Oct 2001 11:16:18 -0700 Subject: Quartzware change Message-ID: <3BD5B3F2.A947F235@snf.stanford.edu> Users - I have just changed the 4108 quartzware from oxidation to silicide. The sign & cassettes have been changed also. Len From balaji at sunray.snffab.stanford.edu Fri Oct 26 12:13:48 2001 From: balaji at sunray.snffab.stanford.edu (Balaji Venkateshwaran) Date: Fri, 26 Oct 2001 12:13:48 -0700 (PDT) Subject: tray change to oxidation Message-ID: <200110261913.MAA08015@sunray.snffab.stanford.edu> AG4108 users, We're playing the tray-changing game again. I have requested Len to change the tray to oxidation on Monday. If there's a conflict, please let us know. Balaji From booth at snf.stanford.edu Mon Oct 29 13:48:18 2001 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 29 Oct 2001 13:48:18 -0800 Subject: AG4108 Quartzware change Message-ID: <3BDDCEA2.ADD514DF@snf.stanford.edu> AG4108 users - The quartzware has been changed from silicide to oxidation, and the cassettes & sign have also been changed. Len From sjain at stanford.edu Wed Oct 31 07:42:08 2001 From: sjain at stanford.edu (Sameer Hemchand Jain) Date: Wed, 31 Oct 2001 07:42:08 -0800 (PST) Subject: AG4108 uniformity run In-Reply-To: <200110182346.QAA19949@sunray.snffab.stanford.edu> Message-ID: Hi, I am hoping to use the silicide tray in the RTA tomorrow (thursday) and plan to ask Len to change the trays. I hope this is fine with all the users. In case of a conflict please let me know thanks Sameer