From bgreene at stanford.edu Mon Sep 10 08:31:38 2001 From: bgreene at stanford.edu (Brian Joseph Greene) Date: Mon, 10 Sep 2001 08:31:38 -0700 (PDT) Subject: Quartzware change this afternoon Message-ID: AG4108 users, I have asked Len to change the quartz tray to the oxidation for a reservation I have this evening. There are currently no other users with a reservation on the AG4108 today, and the tray will be switched back to silicide tomorrow morning, so there shouldn't be too much interruption of anyone's processing schedule. If for some reason this switch does cause a problem for you, please let me know. Otherwise, Len will switch the quartz trays sometime this afternoon. Thanks, Brian _____________________________________________________________ Brian J. Greene Office: CIS-X 128X Applied Physics Dept, MC 4090 Phone: (650) 723-4194 ext 5 Stanford University Pager: (650) 354-9687 Stanford, CA 94305-4090 Fax: (650) 723-4659 From booth at snf.stanford.edu Mon Sep 10 14:50:10 2001 From: booth at snf.stanford.edu (Len Booth) Date: Mon, 10 Sep 2001 14:50:10 -0700 Subject: AG4108 quartzware change Message-ID: <3B9D3592.7A13F95E@snf.stanford.edu> The quartzware has been changed from silicide to oxidation, also the sign and the cassettes have been changed. Len From booth at snf.stanford.edu Tue Sep 11 12:53:05 2001 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 11 Sep 2001 12:53:05 -0700 Subject: AG4108 quartzware change to Silicide Message-ID: <3B9E6BA1.DB6CBA59@snf.stanford.edu> The quartzware was changed today from oxidation to silicide, also the sign and the cassettes were changed also. Len From balaji at sunray.snffab.stanford.edu Mon Sep 17 10:37:16 2001 From: balaji at sunray.snffab.stanford.edu (Balaji Venkateshwaran) Date: Mon, 17 Sep 2001 10:37:16 -0700 (PDT) Subject: wafer out temp. Message-ID: <200109171737.KAA24017@sunray.snffab.stanford.edu> AG4108 Users, Please make sure the wafer out temp (under "Recipe Edit Parameters") does not exceed 300C in the AG4108, or it might burn up the metal ring on the robot arm (besides causing a $1000 repair). I noticed a user over the weekend had turned up the wafer out temp. to 520C. THIS IS A RECIPE GUARANTEED TO BURN THE RING. Please be a little patient till the wafer cools to below 300C. Balaji From ychliu at stanford.edu Mon Sep 17 18:10:26 2001 From: ychliu at stanford.edu (Yaocheng Liu) Date: Mon, 17 Sep 2001 18:10:26 -0700 (PDT) Subject: wafer out temp. In-Reply-To: <200109171737.KAA24017@sunray.snffab.stanford.edu> Message-ID: Balaji and I found out what was going on with the wafer out temp setting. According to the coral history, I was the only user who used ag4108 over the weekend. I used recipe #7 in Ali's disk, in which the wafer out temp is set to be 250C. I double checked it before I ran the program, so it was definitely 250C when I was working on my samples. We checked recipe #7 in Ali's disk again this morning and found it was 250C. So there should be no problem at all. So why Balaji found 520C this morning? Here is the story. When I loaded the recipes from Ali's disk, all the recipes were overwritten with the ones read from that disk. As recipe #7 is the only one we use in that disk, all the parameters in #7 are set right but we never take care of the parameters in other recipes. When Balaji came in this morning, he checked the parameters of recipe #1 without doing a new reading from the user disk, while the wafer out temp of recipe #1 in Ali's disk happens to be 520C. After he did the recipe reading from the user disk, the setting was righ (275C). Based on this story, there are two suggestions. First, do a recipe reading from the user disk or your own disk. Don't assume the recipes loaded by the previous user are correct for you. Second, before starting your run, do a double check to make sure the parameters are set to the right values. Yaocheng On Mon, 17 Sep 2001, Balaji Venkateshwaran wrote: > AG4108 Users, > > Please make sure the wafer out temp (under "Recipe Edit Parameters") does not > exceed 300C in the AG4108, or it might burn up the metal ring on the robot arm > (besides causing a $1000 repair). I noticed a user over the weekend had turned > up the wafer out temp. to 520C. THIS IS A RECIPE GUARANTEED TO BURN THE RING. > Please be a little patient till the wafer cools to below 300C. > > Balaji > > Yours, Yaocheng ************************************************ Yaocheng Liu Department of Materials Science and Engineering Stanford University Office: CISX 306 E-mail: ychliu at leland.stanford.edu Tel: 650-947-8087(H) 650-725-4549(O) ************************************************ From mokhberi at stanford.edu Tue Sep 18 11:48:48 2001 From: mokhberi at stanford.edu (Ali Mokhberi) Date: Tue, 18 Sep 2001 11:48:48 -0700 Subject: User Disks Message-ID: <4.3.2.7.2.20010918113032.02655a60@mokhberi.pobox.stanford.edu> Hi Everyone, Since the incident with the high wafer-out temperature was caused because of a recipe on my disk, I wanted to address a few points in order to prevent future problems: 1) I was not aware of these recipes on my disk since I had never used them. So, all of us who have our own user disks should check all the recipes on the disk and either DESTROY OR CORRECT the "dangerous" recipes. This should be done immediately. 2) Please double check EVERYTHING before you run your wafers. The procedures for using AG4108 states checking all gauges, gas pressures, water flow, air flow, wafer-out temp etc. Please follow these instructions. If you are not sure what is supposed to be checked, refer to the folder next to the AG4108. 3) If you change any settings, CHANGE THEM BACK to the original state when you are done. For example, reload the standard user's disk, enable oven-preheat if you had disabled it etc. Thank you Ali From hjcho at t-ram.com Mon Sep 24 09:02:12 2001 From: hjcho at t-ram.com (Hyun-Jin Cho) Date: Mon, 24 Sep 2001 09:02:12 -0700 Subject: Tray change to oxidation Message-ID: <09D9A35A159F1840B6B70EAD4E681A1D043991@gate.t-ram.com> I would like to change the tray to oxidation tomorrow. Please let me know if there is a conflict. H.J. From booth at snf.stanford.edu Tue Sep 25 15:32:59 2001 From: booth at snf.stanford.edu (Len Booth) Date: Tue, 25 Sep 2001 15:32:59 -0700 Subject: AG4108 Quartzware change Message-ID: <3BB1061B.C7A486E6@snf.stanford.edu> Users - The quartzware in the AG4108 has been changed from silicide to oxidation, the cassettes have been changed, and the sign above the oven door has been changed. Len From ehkim at stanford.edu Wed Sep 26 13:54:12 2001 From: ehkim at stanford.edu (Eun-Ha Kim) Date: Wed, 26 Sep 2001 13:54:12 -0700 Subject: cancel reservation (4-6pm, today) Message-ID: <000c01c146cd$657ff850$316340ab@EUN> I'm deleting my reservation for today, 4-6pm. Sorry for the late notice. ______________________________ Yours truly, Eun-Ha Kim CISX Building, Rm 300 Stanford University Stanford, CA 94305 Phone : (650) 725-0419 Email : ehkim at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: